Feedback control for priority rules in re-entrant semiconductor manufacturing

He, Fenglan; Armbruster, Dieter (Corresponding author); Herty, Michael; Dong, Ming

Amsterdam [u.a.] : Elsevier Science (2015)
Journal Article

In: Applied mathematical modelling
Volume: 39
Issue: 16
Page(s)/Article-Nr.: 4655-4664

Abstract

Identifier