Feedback control for priority rules in re-entrant semiconductor manufacturing
He, Fenglan; Armbruster, Dieter (Corresponding author); Herty, Michael; Dong, Ming
Amsterdam [u.a.] / Elsevier Science (2015) [Journal Article]
Applied mathematical modelling
Volume: 39
Issue: 16
Page(s): 4655-4664
Abstract
Identifier
- DOI: 10.1016/j.apm.2015.03.061
- REPORT NUMBER: RWTH-2015-06711