Feedback control for priority rules in re-entrant semiconductor manufacturing
Amsterdam [u.a.] / Elsevier Science (2015) [Journal Article]
Applied mathematical modelling
Volume: 39
Issue: 16
Page(s): 4655-4664
Authors
Authors
He, Fenglan
Armbruster, Dieter
Herty, Michael
Dong, Ming
Identifier
- DOI: 10.1016/j.apm.2015.03.061
- REPORT NUMBER: RWTH-2015-06711